http://desertsilicon.com/spin-on-glass/ Webing the spin-coat process, an insoluble residue (usually a fine silicate dust) is produced. This residue can be a major source of particles on the wafer surface. These particles can …
US5461010A - Two step etch back spin-on-glass process for semiconductor …
WebSpin-on Glass (SOG) Electronic polymers with industry proven performance for metal and poly planarization, overcoat passivation, and gap fill in the manufacture of integrated circuits. They offer high thermal stability and minimal wafer thickness variation. WebGlass with Random Anisotropies, Phys. Rev. B25, 5489 (1982). 73. A. Weinrib and B. I. Halperin, Distribution of Maxima, Minima, and Saddle Points ... a two-dimensional semiconductor system with Rashba spin-orbit coupling, Phys. Rev. B 76, 085319 (2007) 233. B. Rosenow and B. I. Halperin, Influence of Interactions on Flux and Back-Gate Periods of dad\u0027s order of service
Spin-on Glass (SOG)
WebMar 20, 2024 · Spin-On-Glass (SOG) is commonly used in the semiconductor industry for interlayer dielectric planarization application. An etch-back process is most commonly used which involves depositing a thin layer of CVD film, applying SOG and then etching away the SOG material on top of metal lines to leave the SOG in the metal spaces. WebSpin-on glass or spin-on dopant doping is a two-step process of applying a mixture of SiO2 and dopants (in a solvent) onto a wafer surface by spin-coating and then stripping it and baking it at a certain temperatue in the furnace at constant nitrogen+oxygen flow. [14] Neutron transmutation doping [ edit] WebPlanarization techniques include: 1) oxidation; 2) chemical etching; 3) taper control by ion implant damage; 4) deposition of films of low-melting point glass; 5) resputtering of deposited films to smooth them out; 6) use of polyimide films; 7) use of new resins and low-viscosity liquid epoxies; 8) use of spin-on glass (SOG) materials; 9) … binus executive education